Micro-optical devices are an important branch of optical devices, which provide important support for the development of optical communication, optical sensing, optical computing and other fields. Micro-optics have the advantages of small size, low power consumption, and low cost, and can be integrated with electronic devices to achieve more efficient data transmission and signal processing. In the future, with the further development of micro-nano fabrication technology, the functions of micro-optical devices will continue to expand, and the application range will be further broadened. At the same time, micro-optical devices are also facing challenges in preparation process, material properties, device reliability, etc., which require further research and improvement.
Microoptics are optical components that range in size from micrometers to millimeters, and are much smaller than traditional optical devices. Micro-optical devices use micro-nano processing technology to integrate the functions of optical devices into micron-sized chips, which have the characteristics of miniaturization, integration, high efficiency and low cost. The combination of nano-scale contour fluctuations and ultra-smooth and transparent microoptics can meet the measurement needs of 3D optical profiles (white light interferometry).
The 3D optical profiler works by exploiting the interference and diffraction phenomena of white lightEnables precise measurement of small surface height differences and yields accurate dimensional and morphological data
For the measurement of ultra-smooth and transparent micro-optics, 3D optical profilers are not only characterized by high accuracy and high resolution, but also:It can quickly and non-destructively obtain the 3D topography information of the objectTherefore, white light interferometers have the following important features and advantages:
1. High precision: The 3D optical profiler is capable of measuring at the nanometer level and can accurately detect small height differences in the surface of the device. This is important for some very demanding device size and topography measurements.
2. High resolution: The 3D optical profiler has a high spatial resolution and can capture even the smallest surface changes. It can clearly display various subtle texture and morphological characteristics on the surface of micro-optical devices, which provides strong support for subsequent analysis and optimization.
3. Fast non-contactCompared with traditional measurement methods, the 3D optical profiler does not need to be in direct contact with the measured object, avoiding damage and deformation of the device. At the same time, its measurement speed is fast, and a large amount of data can be collected and analyzed in a short time.
4. Three-dimensional measurement: The 3D optical profiler can realize the three-dimensional measurement of the surface of the device, that is, obtain the topography, geometry and curvature of the surface. This is of great significance for the design and manufacture of micro-optical devices, which can help analyze the performance and effect of the devices and provide guidance for the subsequent processing process.
5. Widely used3D optical profilers have a wide range of applications in microelectronics, optical processing, semiconductor manufacturing and other fields. It can be used to accurately measure optical lenses, optical fiber end faces, fiber laser heads, optical coatings and other devices, providing important tools and means for quality control and process optimization.
In order to obtain better optical treatment results, it is necessary to process the structure of optical materials such as glass or resin by micro-nano process, such as the laser diffuser for light diffusion in the popular projector, as well as various diffraction elements composed of special patterns, industrial gratings, and special-purpose optical devices.
3D profiler