At present, the mainstream application of display technology is:LCD and OLEDDriven by Haize's law (that is, the cost per lumen decreases by 10 times every decade at a given wavelength of light, and the amount of light emitted per LED component increases by 20 times every decade), the market size of new display technologies such as flexible electronics and mini micro LED will increase rapidly in the medium and long term.
Water vapor transmittance (WVTR) is an important indicator to measure the water and oxygen resistance of the film, because the display device is very prone to aging and denaturation after being penetrated by water and oxygen, resulting in obvious attenuation of the brightness and service life of the device, so it is necessary to use water and oxygen blocking materials for packaging protection, among which the flexible OLED display that can be bent is more sensitive to water vapor, and its WVTR index needs to reach less than 10-4G MD.
The WVTR of other new display technologies also needs to be at least less than 10-3G MD to ensure reliability in harsh environments. Considering the higher requirements of the new display technology for package protection, the ALD film layer hasHigh density, no pinholes, good shape retention, insulation, water and oxygen resistanceNew display technologies such as flexible OLED began to use ALD coatings to ensure their stability.
The precision required by the early LED processing technology cannot be compared with that of integrated circuits, and the waterproof steam and anti-oxidation are not as strict as OLED, but with the trend of continuous shrinking chip size and the rise of high-power density chip-level packaging CSP, the advantages of ALD technology are gradually reflected, and it has entered the sight of the new display industry, and the market demand for ALD technology will be further expanded.