RTP (Rapid Thermal Processing) furnaces are commonly used in semiconductor manufacturing and other high-temperature processing processes. Oxygen content is a critical parameter in these processes, as it can affect the properties of the material. Monitoring the oxygen content in an RTP rapid annealing furnace often involves the use of specialized instruments and techniques.
The MicroX-223 Oxygen Analyzer is a high-precision instrument specifically designed to measure oxygen content in gases, making it ideal for monitoring oxygen levels on RTP fast annealing furnaces. This analyzer combines advanced technology with reliable measurement principles to provide accurate and fast oxygen content data at high temperatures and in harsh industrial environments.
Features:
Measuring range: 1ppm-25 o2
ReliableZirconia sensorTechnology.
Suitable for harsh environments.
Fast response. Din rail mounting.
LCD display and 4 multi-function buttons.
4-20mA signal output.
RS-232 communication protocol.
24VDC power supply.
3 groups of relay alarms.
m18x1.5. Threaded process interface.
The following are the steps and precautions for monitoring oxygen levels on an RTP rapid annealing furnace with the MicroX-223 Oxygen Analyzer:
Installation and calibration
Install the MicroX-223 Oxygen Analyzer in the appropriate location in the RTP rapid annealing furnace to ensure that the sensor has accurate access to the gases inside the furnace.
Calibrate the analyzer prior to installation to ensure the accuracy of its measurements. Calibration typically includes zero calibration and range calibration.
Integration into the control system
The MicroX-223 oxygen analyzer is integrated with the RTP annealing furnace's control system to enable real-time transmission and display of oxygen content data.
Through the control system, the alarm threshold can be set, and when the oxygen content exceeds or falls below the preset value, the system will automatically send out an alarm so that the operator can take timely countermeasures.
Real-time monitoring and data logging
During the operation of the RTP annealing furnace, the MicroX-223 oxygen analyzer monitors the oxygen content in the furnace in real time and transmits the data to the control system in real time.
The control system can automatically record historical data on oxygen content and generate reports or trend graphs for subsequent analysis and optimization of process parameters.
Maintenance and calibration
The MicroX-223 oxygen analyzer is regularly maintained and calibrated to ensure long-term stable operation and measurement accuracy.
Replace sensors and consumables regularly according to usage and manufacturer's recommendations.
Training and operation
Train operators on the fundamentals, operating methods, and maintenance requirements of the MicroX-223 Oxygen Analyzer.
Operators should be familiar with the interface and functions of the control system, be able to correctly interpret the oxygen content data, and adjust the process parameters as needed.
By using the MicroX-223 oxygen analyzer, the oxygen content of the RTP rapid annealing furnace can be accurately and real-time monitored, thus ensuring product quality and production safety. At the same time, through the analysis and processing of historical data, process parameters can be optimized, production efficiency can be improved and costs can be reduced.