ASML s latest EUV lithography machine came out with a value of 2.7 billion yuan and a weight of 150

Mondo Technology Updated on 2024-02-17

Kunpeng Project

ASML's latest EUV lithography machine came out: worth 2.7 billion yuan, weighing 150 tons, and requiring 250 people and 180 days to install.

As we all know, ASML is the only company in the world that has the ability to manufacture extreme ultraviolet lithography technology.

The lithography machines launched by ASML are all a size in 033 or so lithography equipment, that is, small-sized calibers, is called small-size lithography machines.

And below 3 nm, i.e. 2 nm, 1At 4 nm and 1 nm, high digital aperture lithography equipment is used, i.e., na=055, which corresponds to exe:5200.

Not long ago, ASML has provided Intel with the world's first high-digital aperture lithography device called EXE:5200.

What a terrible device is this? First of all, it reached 350 million euros. It is about the same size as an ordinary bus, with a total mass of 150 tons.

This kind of lithography equipment is impossible to carry after the assembly is completed, and it needs to be disassembled into parts and sent to the user before it can be assembled.

A total of 250 containers were used during transportation, and 250 engineers were mobilized during transportation, and it took another six months to assemble and commission all the components.

As a result, ASML sold the world's first EUV lithography machine to Intel, but that was only the first time it was sent to Intel, and it was still six months before it was actually put into use.

According to Intel's plan, the 2 nm process will not be put into use until at least 2025.

The CEO of ASML once said that the caliber of this number will be 055 or more for a while, because ASML is no longer sufficient for the current needs.

Nowadays, there are three main ways for EUV lithography machines to improve their resolution, the first is to reduce the wavelength of luminescence, however, at 135 nm, that's its maximum limit, it's impossible to continue to fall. The second is to increase the numerical caliber, but this step is stuck there, and ASML tells him that this numerical caliber has reached the upper limit and cannot be increased.

Another is to improve the efficiency of lithography, but now that technology has reached the extreme of physiology, there is no way to go further.

In the short term, all three sides are dead, indicating that the accuracy of EUV can no longer be further advanced, and where will EUV go in the future?Nobody knows.

Therefore, can Canon's NIL and other products replace EUV lithography machines in the future and embark on the road of world development?

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