Definition and Composition
Ceramic targets are composed of high-purity non-metallic compounds, mainly including oxides, silicates, nitrides, etc. These targets are usually prepared by high-temperature sintering to form solid materials with complex chemical and physical properties. Their unique composition gives them an irreplaceable position in high-tech applications, especially in semiconductor manufacturing, optoelectronic materials and thin film technology.
Key Features & Benefits:
High purity: ceramic targets can reach 99High purity levels above 99%, which are essential for the preparation of high-performance electronic and optoelectronic devices, as any tiny impurities can seriously affect the performance of the device.
Good chemical stability: Under high temperature and other extreme conditions, the ceramic target exhibits excellent chemical stability, which can resist the attack of chemical reagents such as acids and alkalis, and ensure that its chemical composition remains unchanged for a long time.
High melting point and high hardness: The high melting point of the ceramic target ensures stability at high temperatures, while its high hardness makes the target resistant to various physical wear and tear and prolongs its service life.
Fields of application
Semiconductor manufacturing: In the semiconductor industry, ceramic targets are used to create thin films with specific electrical properties, which are the basis for making integrated circuits and microchips.
Thin film deposition: Ceramic targets can be used to prepare photoelectric conversion thin films and protective coatings through physical vapor deposition (PVD) or chemical vapor deposition (CVD) technology.
Preparation of optoelectronic materials: In the optoelectronic industry, ceramic targets are used to produce key materials such as solar panels, photoelectric sensors and display devices.
Preparation process
Powder metallurgy technology: the raw material powder is mixed evenly by physical or chemical methods, and then pressed and shaped under a specific atmosphere and temperature, and finally a solid ceramic target is formed by sintering.
Sintering process: Sintering is a physical and chemical reaction between ceramic powder particles through high temperature treatment, and the voids between particles are reduced to achieve densification, so as to obtain ceramic targets with the required physical and chemical properties.
Definitions and Composition
Metal targets are constructed from a single metal or metal alloy that is specially processed and refined to meet the requirements of high purity and specific microstructures. Common metal targets include copper, aluminum, silver, titanium, etc., as well as their alloys. Metal targets are selected based on their unique physical and chemical properties to optimize the performance and efficiency of processes such as ion implantation and thin film deposition.
Key Features & Benefits:
High thermal conductivity: The excellent thermal conductivity of the metal target is extremely important for thermal management during thin film deposition, helping to improve deposition efficiency and film quality.
Good electrical conductivity: The high electrical conductivity of metal targets makes them widely used in the electronics and photovoltaic industries, especially in the manufacture of conductive films and electrode materials.
Plasticity: The high plasticity of metal targets allows them to be processed into a variety of shapes and sizes to meet the needs of different manufacturing processes.
Fields of application
Preparation of metal films: Metal targets are widely used in the preparation of conductive films, light reflective films, anti-reflective layers and other fields, which are widely used in electronic devices, photovoltaic modules and optical instruments.
Specular reflective films: In the optical and decorative industries, metal targets are used to produce highly reflective mirrors** for the manufacture of mirrors, decorative materials, etc.
Magnetic materials: Specific metal targets are also used to prepare magnetic thin films, which are key components of hard disk drives, sensors, and other storage devices.
Preparation process
Melting and casting: The preparation of metal targets first involves a melting process in which a pure metal or alloy is melted at a high temperature and then cast to form a predetermined shape of the blank.
Hot and cold rolling technology: Subsequently, these blanks go through a hot or cold rolling process to improve their microstructure and physical properties. Cold rolling increases the strength and hardness of the target, while hot rolling is used to form large targets.
Comparison of physical properties
Hardness and melting point: Due to their unique chemical structure, ceramic targets usually have higher hardness and melting point, making them more stable at high temperatures and suitable for high-temperature thin film deposition processes. In contrast, although the hardness of metal targets is low, its excellent plasticity makes it more convenient to process and shape, and is suitable for the preparation of various complex shapes.
Thermal and electrical conductivity: Metal targets far outperform ceramic targets in terms of thermal and electrical conductivity, which makes metal targets the preferred choice for applications that require good thermal management and electrical properties.
Comparison of chemical stability
Ceramic targets offer significant advantages in terms of chemical stability, especially in applications at high temperatures or in corrosive environments. They do not react easily with other elements, keeping the material pure and stable. Metal targets, on the other hand, are stable under normal conditions, but may oxidize or corrode in certain environments.
Cost vs. preparation difficulty
Cost: Metal targets are generally less expensive than ceramic targets from a cost perspective due to the relatively simple extraction, processing, and preparation of the metal. The preparation of ceramic targets requires more complex processes, such as high-temperature sintering, which increase their production costs.
Difficulty in preparation: Ceramic targets are difficult to prepare, not only because of the high temperature sintering process, but also because of the need to control their purity and microstructure to ensure the performance of the final product. In contrast, the melting and processing process of metal targets is relatively simple, highly malleable, and easy to form and process.
Differences in application scenarios
Due to their high purity, chemical stability and high melting point, ceramic targets have unique applications in semiconductor manufacturing, high-temperature thin film deposition, and optoelectronic material fabrication. These areas of application often require materials with extremely high performance standards.
Metal targets are widely used in applications that require good electrical and thermal conductivity, such as the preparation of conductive films, the production of specular reflective films and magnetic materials. Their excellent plasticity also gives them an advantage in the manufacture of targets with complex shapes.