Industry background.
Semiconductor manufacturing can be said to be the core industry of the modern electronics industry, which is widely used in computers, communications, automobiles, medical and other fields. In the process of semiconductor production and processing, such as etching, coating, diffusion, deposition, annealing, etching, vacuum pump is an indispensable key equipment, which can build a stable and controlled vacuum environment to avoid product pollution, oxidation or other defects, and has a non-negligible impact on the quality, life and performance of semiconductor products.
In order to ensure the safe and stable operation of the vacuum pump, Wutong Bolian provides a data acquisition remote monitoring system based on the industrial intelligent gateway to realize the best monitoring and early warning of the operation status and process parameters of the vacuum pump, so as to help the factory take timely measures to ensure production safety and product quality.
Industry pain points. Difficult data collection: Vacuum pumps are usually distributed at the production site or remote locations, and the traditional manual data collection method requires manual data copying on site, which is a large workload, so data collection is required to achieve remote monitoring.
Fault early warning challenge: The failure of vacuum pump operation cannot be perceived in time, once the failure occurs, it will affect the stability and safety of production, and at the same time cause material waste, so a fault early warning and alarm mechanism is needed.
Data application problems: The data generated by the vacuum pump includes various parameters such as pressure, temperature, vibration, etc., which need to be processed and analyzed in real time, and data reports and analysis channels are needed to achieve quality and efficiency improvement, energy saving optimization, etc.
Solution. The semiconductor industry is gradually realizing automated production, and vacuum pumps have been widely used through PLC automatic control, so it is only necessary to connect the Wutong Bolian industrial intelligent gateway to the PLC, and the working parameters (pressure, temperature, vibration, etc.) of the vacuum pump in the PLC can be collected in real time and uploaded to the cloud platform or local host computer through 5G 4G WiFi Ethernet, etc., so as to realize the functions of remote monitoring, fault alarm, remote control and remote maintenance of equipment.
Through the mobile phone and computer, the factory can remotely view the process configuration screen and understand the operation status, process parameters, fault information, operation and maintenance records of each vacuum pump, so as to achieve timely management and control and maintain a safe and stable production order.
System features. 1. Data collection: The system can collect the operating status data of the vacuum pump in real time, such as pressure, temperature, vibration, etc., and generate visual charts for quick query of real-time data and historical data.
2. Configuration monitoring: The system can customize the cloud configuration, view the working status and parameter changes of each vacuum pump, support custom editing, add and delete controls by dragging and dropping, and the operation is simple and easy to understand.
3. Remote monitoring: Through smart terminals such as mobile phones or computers, users can view the real-time operation status and historical data of the vacuum pump anytime and anywhere, which improves the management efficiency and production efficiency of the equipment.
4. Abnormal handling: When the vacuum pump has an abnormal situation, the system will automatically alarm and record the abnormal information, which is convenient for users to quickly find and solve the problem, and reduce production loss and material waste.
5. Remote maintenance: engineers can remotely program and debug the remote PLC and remotely upload the best program to reduce business trips and expenses, and improve work efficiency and after-sales service quality.
6. Data analysis: According to the analysis and processing of the collected data, you can understand the performance and energy consumption level of the equipment, and also take measures to optimize the management and improve the production efficiency.
System benefits. Through the real-time monitoring and fault alarm of the vacuum pump, the vacuum environment of the semiconductor chip generation process can be finely controlled, and the parameters in the process can be guaranteed to be stable and normal, which can ensure that the enterprise can improve the efficiency and reliability of the equipment, reduce downtime and maintenance time, and bring more economic benefits to the enterprise.