Semiconductor cleanroom temperature and humidity control has a critical impact on the quality and production efficiency of semiconductor products. In this article, Fulin Construction introduces in detail the methods and standards of temperature and humidity control in semiconductor clean rooms, and helps readers understand how to achieve effective temperature and humidity control to meet the requirements of semiconductor manufacturing.
1 Understand the control criteria.
First of all, it is necessary to understand the temperature and humidity control standards of semiconductor clean rooms. Generally speaking, the temperature of the semiconductor clean room needs to be controlled at 22-26, and the relative humidity needs to be controlled at 45%-60%. These standards are based on the requirements of semiconductor manufacturing and the level of air cleanliness.
2 Choose the right air-conditioning system.
Choosing the right air conditioning system is the key to achieving temperature and humidity control in semiconductor cleanrooms. When choosing an air conditioning system, there are a few things to consider:
Cooling and heating capacity: Depending on the space size and temperature requirements of the semiconductor cleanroom, select an air conditioning system with sufficient cooling and heating capacity.
Air filter: Choose an air conditioning system with a high-efficiency air filter to reduce particulates and harmful gases in the air and ensure that the air cleanliness meets the standards.
Humidity control: Choose an air-conditioning system with humidity control to ensure that the relative humidity is within the specified range.
Noise and vibration: Choose an air conditioning system with low noise and vibration to reduce the impact on the semiconductor manufacturing process.
3. Reasonable layout and use of equipment.
Reasonable layout and use of equipment can reduce the impact on the temperature and humidity of semiconductor clean rooms. Here are some suggestions:
Avoid placing too much equipment and items in the clean room to reduce the resistance of air flow, which is conducive to temperature and humidity control.
Install an exhaust vent or exhaust device above the equipment to remove heat and moisture generated while the equipment is operating.
Use partitions or fences around the equipment to reduce the impact on cleanroom air flow.
4 Regular maintenance and inspection.
Regular maintenance and inspection are important measures to ensure the stability of temperature and humidity control in semiconductor clean rooms. Here are some suggestions:
Clean your air conditioning system regularly, including replacing air filters and other components, to ensure it is functioning properly.
Regularly inspect temperature and humidity sensors and controllers to ensure their accuracy and reliability.
Regularly inspect the cleanroom tightness and differential pressure to ensure that air is not leaking and that the differential pressure is up to standard.
Regular maintenance and maintenance of the equipment to reduce the impact of heat and moisture generated during its operation on temperature and humidity.
In short, controlling the temperature and humidity of semiconductor clean rooms requires many aspects, including understanding the control standards, selecting the appropriate air conditioning system, rational layout and use of equipment, and regular maintenance and inspection. Only by comprehensively considering and taking effective measures can we achieve stable temperature and humidity control and ensure the quality and production efficiency of semiconductor products. If you want to know more about laboratory purification, operating room purification, workshop purification, etc., please pay attention to Fulin Purification Baijia or the official website.