Text: Vacuum coating machine is one of the most important equipment in the modern industrial field, which is widely used in electronics, optics, materials and other fields. In vacuum coaters, DC sputtering power supply and magnetron sputtering instrument are very important components. This article will focus on the structure, principle, characteristics and application of small magnetron sputtering instrument for DC sputtering power supply.
1. Structure and principle.
DC sputtering power supply small magnetron sputtering instrument is mainly composed of cathode, anode, vacuum chamber and control system. Its working principle is mainly by applying a direct current voltage between the cathode and the cathode, so that the surface of the cathode produces electron emission, and accelerates to the anode under the action of the electric field, and some of the electrons will excite more electrons in the process of collision with gas molecules, thus forming an "avalanche" effect and ionizing gas molecules. During the ionization process, the ionized gas forms a thin film on the surface of the anode, which is called the coating.
2. Features. DC sputtering power supply small magnetron sputtering instrument has the following characteristics:
1.High deposition rate: Due to the "avalanche" effect, which ionizes gas molecules quickly, the coating rate is very high.
2.Uniform coating: Due to the action of the magnetic field, the flight trajectory of the electrons is controlled in a plane, so that the coating is more uniform.
3.Easy to operate: DC sputtering power supply small magnetron sputtering instrument has simple structure, easy operation and easy maintenance.
4.Wide range of applications: Due to its unique properties, DC sputtering power supply small magnetron sputtering instrument has a wide range of applications in optics, electronics, materials and other fields.
3. Application. 1.Optics: In the field of optics, coating is a very important part. DC sputtering power supply small magnetron sputtering instrument is widely used in the preparation of optical thin films due to its uniform coating and fast speed. For example, there are applications in spectacle lenses, camera lenses, solar cells, etc.
2.Electronics: In the electronics field, coating is also one of the most important links. For example, in the process of manufacturing integrated circuits, displays, etc., coating technology is required to improve the performance and stability of products. The DC sputtering power supply small magnetron sputtering instrument can provide high-quality coatings, thus providing strong support for the manufacture of electronic products.
3.Materials: In the field of materials, coating technology is widely used in the surface treatment and modification of materials. For example, coating a layer of ceramic materials such as oxide or nitride on the surface of the metal can improve the wear resistance and corrosion resistance of the metal. The DC sputtering power supply small magnetron sputtering instrument can provide high-quality coating, which provides strong support for the surface treatment and modification of materials.
In short, as an important coating equipment, the DC sputtering power supply small magnetron sputterer has a wide range of application prospects in various fields. With the continuous development of science and technology, its application field will also continue to expand. At the same time, we should also continue to explore new technologies and methods to make greater contributions to the development of vacuum coating technology.