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1.Shanghai Microelectronics.
It is a leading manufacturer of design and integrated lithography machines in China, and a leading enterprise in the field of semiconductor equipment.
In the front-end field, the lithography machine has been able to meet the critical layers of 90, 110, and 280nm.
In the back-end field, the lithography machine is used in the field of advanced packaging of 8-inch and 12-inch integrated circuits, which can meet the wafer-level lithography process needs of advanced packaging technology, and has manufactured the first 25D 3D advanced packaging and testing lithography machine.
2.Huazhuo Jingke.
It is the first enterprise in China to independently develop and realize the commercial production of double workpiece tables of linear motor lithography machines, and the first business of double workpiece table products and technology development of Shanghai Microelectronics.
In response to the needs of domestic high-end IC front-end lithography machines, we have launched two series of double workpiece tables, DWS and DWSI, which can provide technical development services and products according to customer customized needs.
3.Keyi Hongyuan.
A scarce company with the research and development capabilities of lithography excimer laser technology in China.
The business includes the sales and technical services of domestic self-developed lithography light source products, imported high-end light source technical services, integrated circuit detection light sources, special high-voltage power supplies, high-end light source core components and other products. The main products are DUV (deep ultraviolet) lithography light source series.
4.Suda Vig.
A leading manufacturer of micro-nano structure products and technical services in China.
Self-developed laser direct writing lithography machine and nanoimprint lithography machine.
In terms of key components of lithography machine, Shanghai Microelectronics has provided positioning grating components for projection lithography machine in the semiconductor field.
5.Jingfang Technology.
It is a leading professional packaging and testing manufacturer in China, and its core technology is wafer-level optical component technology. Acquired Anteryoon, one of ASML's core leading merchants, through a subsidiary, so as to lay out lithography machine-related business.
Anteryoon is one of the core suppliers of ASML, the world's leading lithography machine. Anteryon can apply replication technology on wafer-level components and realize optical structures on glass or silicon wafers, stack various wafers and spacers, and integrate functions such as aperture or electronics into layers, enabling high-volume, low-cost production of complex optical components.
6.Xinlai should be material.
For semiconductor core equipment, it provides a variety of parts and components such as vacuum valves, pipe fittings, reaction chambers, gas cylinders, etc.
It has cooperated with world-renowned semiconductor equipment manufacturers and well-known domestic semiconductor equipment manufacturers, such as AMAT, Ram Research, NAURA and China Micro Semiconductor.
Cooperate with end customers, such as TSMC, Intel, Samsung, YMTC, Huike, etc.
7.Tengjing Technology.
The products are mainly used in optical communications, fiber lasers and other fields.
It has established cooperative relations with downstream enterprises and scientific research institutions, including Lumentum, Finisar, Huawei, etc. in the field of optical communication, Ruike Laser, NLIGHT, etc. in the field of fiber laser.
The related products of the research project "Beam Splitter Project" are applied to the optical system of the lithography machine, which is a customized product development project for customers, and the applied technology has been deeply cultivated in the field of optical optoelectronic precision manufacturing for many years in the design and manufacturing process of optical coating, optical precision machining, glass aspheric molding and optical fiber devices. The progress is about 302%
8.ML Optics.
The leading precision optical solution provider in China, the product is an important optical component of the lithography machine, covering the full spectrum of deep ultraviolet DUV, visible light and far infrared.
The products mainly include precision optical devices, optical lenses and optical systems, which are widely used in semiconductors (including lithography machines and semiconductor testing equipment), life sciences, aerospace, unmanned driving, biometrics, AR VR detection and other fields.
It provides semiconductor testing optical modules for world-renowned semiconductor testing equipment manufacturers such as Camtek and KLA, and has reached long-term strategic partnerships with many global leading companies such as Camtek, KLA, and Shanghai Microelectronics.
9.Focuslight.
It is mainly engaged in the research and development, production and sales of high-power semiconductor laser components and raw materials. The production of light field homogenizers and wide-angle homogenization diffusers are important components in the manufacture of lithography machines.
At present, it is actively expanding the business of photonic application modules, modules and subsystems in the midstream of the photonic industry chain, focusing on automotive applications, pan-semiconductor processes, medical and health care and other fields.
10.Fujing Technology.
It is mainly engaged in the research and development, production and sales of nonlinear optical crystals, laser crystals, precision optical components and laser devices, and also provides important components for the production and manufacturing of lithography machines.
The KBBF crystal is a nonlinear optical crystal that can directly double the frequency to generate EUV laser, which is used in ultra-high optical resolution photoelectron spectrometer, lithography technology and other frontier fields.
11.Fuguang shares.
The main products are optical lenses, optical components, optoelectronic instruments, optical electronic products, etc., and special optical lenses and optoelectronic systems are widely used in high-end equipment such as lithography machines.
12.MayAir Technology.
The leading supplier in the domestic air purification industry. The developed products such as EFU (ultra-thin equipment with own fan filter unit) and ULPA (ultra-high efficiency filter) provide solutions for the high-clean environment required by lithography equipment.
At present, it has 7 domestic production bases and 1 overseas production base, with a production plant area of more than 50,000 square meters.
13.Qingyi Optoelectronics.
Production of masks for flat panel displays, semiconductor chips and other industries.
It has mass-produced 6-inch and 8-inch mask plates for semiconductor chips at the 250nm process node, mainly used in IGBT, MOSFET, silicon carbide and MEMS applications.
We are developing the process development of masks for 130nm-65nm semiconductor chips and the development of mask processes for 28nm nodes.
It has established in-depth cooperative relations with key domestic enterprises such as Zhuzhou Semiconductor, Sanan Integration, Ankoff, Silan Microelectronics, Tyco Tianrun, Shanghai Advanced, Hua Microelectronics, Founder Microelectronics, SMIC, Saiwei Electronics and Changdian Technology.
14.Luwei Optoelectronics.
Domestic scarce can cover g25-G11 is the leading supplier of full-generation mask production capacity.
It already has g2The production capacity of 5-G11 full-generation mask can be matched with all generations of flat panel display manufacturers.
It has realized the mass production of semiconductor masks at 180nm and above process nodes, and has obtained the key core technology for semiconductor mask manufacturing at 150nm process nodes, which can meet the application needs of advanced semiconductor packaging and semiconductor devices in China.
15.Xinqi micro packaging.
It is a leading enterprise in domestic direct-writing lithography equipment, and is deeply engaged in pan-semiconductor direct-writing lithography equipment.
Deepened cooperation with customers such as Shengyi Electronics, Shenghong Technology, Dynamic Electronics, and Hudian Co., Ltd., and added new customer orders from Pengding Holdings, and performed well in market segments such as flexible boards, substrate-like boards, and solder masks.
In the field of IC substrates, the MAS6 series has a minimum line width of 6 m, and the carrier board equipment was successfully sold to the Japanese market in November 2022.
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