What are the processes and steps required for the manufacture of microfluidic chips, this article will focus on the manufacturing of PDMS microfluidic chips:
First of all, in the manufacturing process of microfluidic chips, the most common method in the experimental stage is to make a master through photolithography, which is then used to make a chip made of PDMS material.
a) Photoresists are first deposited on silicon or glass. The thickness of the photoresist is achieved by rotating the wafer at a certain rotational speed for a certain period of time.
b) UV** by mask, which illuminates the desired pattern and catalyzes photoresist crosslinking.
c) * Silicon cargo glass development. A solvent is used to remove uncrosslinked photoresists. The pattern can then be displayed on the surface of the master shape.
d) PDMS molding: PDMS is poured onto the developed masterbatch and polymerized in the oven to form a chip with a flexible PDMS structure.
e) Surface Activation: Cut the holes in the PDMS plate with a cutter of the desired pore size, after which the PDMS and silica-based slides are activated in the plasma chamber.
f) The PDMS microfluidic chip is encapsulated through a membrane or slide to form a runner structure.
Article originally from: Biofount Microfluidics Division.