Lithography machine is a kind of equipment used to manufacture integrated circuits and semiconductor devices, which has extremely high technical content and is known as the "crown jewel" of modern manufacturing. The lithography machine uses the beam to project the surface of the silicon wafer and transfers the circuit pattern to the silicon wafer by means of ** and development, which is one of the most critical equipment in the manufacturing process of integrated circuits.
The working principle of the lithography machine is mainly to project the designed circuit pattern onto the surface of the silicon wafer through the optical system, and use the photochemical reaction of the photosensitive material to transfer the pattern to the surface of the silicon wafer. In this process, the lithography machine needs to achieve high precision, high resolution, and high repeatability in order to ensure the accuracy and consistency of the circuit pattern.
The development history of lithography machines can be traced back to the 60s of the 20th century, when lithography machines mainly used contact technology, that is, the beam was directly projected onto the surface of the silicon wafer. With the continuous development of technology, the lithography machine has gradually adopted more advanced technologies such as proximity technology and projection technology, which has improved the resolution and processing efficiency. Modern lithography machines can already achieve sub-micron and nanometer resolution, with extremely high machining accuracy and repeatability.
Lithography machines play a very important role in the field of integrated circuit manufacturing. With the continuous development of electronic equipment in the direction of smaller, lighter and faster, the manufacturing process requirements of integrated circuits are getting higher and higher, and the performance and manufacturing difficulty of lithography machine, as one of the key equipment for manufacturing integrated circuits, are also improving. At present, EUV lithography has become an important equipment in the manufacturing of a new generation of integrated circuits, which uses EUV as a light source to achieve higher resolution and smaller process technology.
In addition to the field of integrated circuit manufacturing, lithography machines have also been widely used in other fields. For example, in the field of flat panel displays, lithography machines are used to manufacture liquid crystal display panels and organic light-emitting diode display panels. In the field of solar cells, lithography machines are used to manufacture solar panels, etc. In these areas, lithography machines also need to achieve high precision, high resolution, and high repeatability in order to ensure product quality and performance.
In summary, lithography machine is one of the important equipment in modern manufacturing industry, with high technical content and difficult manufacturing. With the continuous development of science and technology, the performance and process technology of lithography machines are also constantly improving, providing important support and guarantee for the development of integrated circuits, flat panel displays and solar cells.
Lithography machine product line