With the development of modern science and technology, micro-nano surface profile topography measurement has become an important research content in many fields. The measurement of micro and nano surface profile topography can help us understand the physical properties, surface morphology, and quality status of materials. So, what are the micro and nano surface profile topography measurement instruments?
1. White light interferometer
White light interferometer is a common micro and nano surface profiler measurement instrument, which is often used to study the microscopic morphology and roughness of products. It uses the difference in wavelength of light to produce interference fringes, and determines the contour of the object's surface by calculating the change of fringes.
In order to meet the requirements of high precision and large scanning range at the same time to complete the ultra-smooth concave arc scanning of the sample, the composite ESI reconstruction algorithm of the W1 white light interferometer solves the double shortcomings of the traditional phase shift method PSI scanning range and low VSI accuracy of the vertical method. With the automatic stitching module, it is only necessary to determine the start and end points, and the automatic scanning can be carried out to reconstruct its ultra-smooth surface area without a single overlapping gap.
White light interferometer has the advantages of wide measurement range, fast measurement and high accuracy, and is widely used in many fields. However, it is mainly used for the measurement of the microscopic topography of products, especiallyMeasurement of a wide range of delicate device surfaces, from smooth to rough, the accuracy is generally sub-nanometer level.
2. Confocal microscope
The confocal microscope is based on the principle of pinhole confocal technology, which has better imaging effect for products with large inclination angles. It is widely used in semiconductor manufacturing and packaging process testing. Ultra-clear nanometer measurement with large inclination angle is more compatible with the use scenario under the condition of satisfying accuracy.
The choice of micro/nano surface profile topography measurement instrument depends on factors such as the required resolution, the type of material, and the experimental conditions. Choosing the right measuring instrument is essential to accurately obtain the surface topography and characteristics of the sample, which can help advance scientific research and technology applications.
Tips for using micro and nano surface profilers:
1.Preparation: Calibration and debugging of the instrument is required before measurements can be made with a micro or nano surface profiler. At the same time, it is necessary to ensure that the surface of the measured object is clean and smooth, and avoid the interference of dust, oil and other substances.
2.Correct operation: When making measurements, it is necessary to operate in strict accordance with the operating manual of the instrument. At the same time, care should be taken to maintain the stability of the instrument and avoid the influence of vibration and temperature changes on the measurement results.
3.Data processing: After the measurement is completed, the measured data needs to be processed. Professional data processing software can usually be used for data export, curve fitting, parameter calculation, and other steps to obtain accurate measurement results.
4.Maintenance: Long-term use of micro and nano surface profiler needs to pay attention to the maintenance of the instrument. Regularly clean the surface and optical path of the instrument, inspect and replace damaged parts to ensure the normal use of the instrument and accurate measurement.
3D profiler