Product Overview:
The RTP-I-CSS-300 is a 12-inch close-range rotary evaporation coating furnace with a 4500mm high vacuum stainless steel chamber, which can be used for evaporation or CSS (Close Spaced Sublimation) coating experiments, oxide, semiconductor, or solar substrate annealing experiments, with a stage size of 300, and the top stage can be rotated to improve the coating uniformity.
The heating element of this high-temperature furnace is two sets of infrared lamps (located at the top and bottom) with a maximum heating rate of 20 sProduct features:
The maximum size of the sample stage is 300 · The upper end of the sample stage can be rotated and moved up and down • The molecular pump is adopted, and the vacuum degree of the furnace cavity can reach 10-3Pa Basic parameters:
Input power AC three-phase 380V 50 60H, maximum power: 64kW • Maximum working temperature: 950 (30min), Long-term working temperature: 900C • Two thermocouples: two K-type thermocouples, one for the upper heating table for measurement and control, one for the lower heating table for measurement and control • Heating element: infrared lamp • Maximum size of the sample that can be loaded: 300mm • Recommended heating rate: 10 s Temperature control system:
Includes an EPC300 series Continental temperature controller PID automatic temperature control system, intelligent 30-segment programmable control, default DB9 PC communication connection port, temperature control accuracy: 01 (up to) • All electrical components are UL or MET approved and can pass other relevant safety tests worldwide • Optional PC temperature control software is available to control the temperature rise curve and export data