Lithography machineConception.
The lithography machine, also known as the mask alignment machine, the first system, the lithography system, etc., is the core equipment for manufacturing chips. It uses a technology similar to that of printing, and prints the fine graphics on the mask through the light to the silicon wafer.
The types of lithography machines can be divided into: contact**, proximity**, projection**. The working principle of the lithography machine is to transmit the light beam through a mask with a circuit diagram through a series of light source energy and shape control means.
Lithography machine overviewReadTrends.
Table: History of lithography machines.
At present, the most advanced domestic lithography machine technology is Shanghai Microelectronics Equipment), and the best performance in the mass production lithography machine is the lithography machine that can be used to process 90nm chips, and there is a large gap with foreign technology.
In 2008, 32-22NMEUV lithography technology was listed as an important research task, and in November 2016, the 02 special project of the national science and technology major project led by Changchun Institute of Optics and Machinery - "Research on Key Technologies of Extreme Ultraviolet Lithography" project successfully completed the on-site test before acceptance, and initially established a processing, testing, coating and system integration platform suitable for the development of extreme ultraviolet lithography optical system, which laid a solid foundation for the sustainable development of China's lithography technology.
China currently has a 90-nanometer lithography machine, and the next technological step is 45-nanometer. In addition, solid-state deep ultraviolet light sources for lithography machines are also being developed, as well as electron beam direct writing lithography machines, nanoimprint equipment, and extreme ultraviolet lithography machine technologies.
The corresponding upgraded photoresists, third-generation refractive fluids, etc. are also being developed accordingly. The workpiece table of lithography machine is one of the difficulties of lithography machine technology, and China has made great breakthroughs in this field.
However, China still needs to make breakthroughs in laser light sources and mirror groups, which is also the key to China's bottleneck dilemma in the field of lithography machines.
Focus onList.
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2. Xuguang Electronics (SH600353).
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Core competitiveness: brand advantage.
3. Huichuangda (SZ300909).
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Core competitiveness: R&D and technical advantages.
4. China Avionics (SZ300114).
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Core competitiveness: industry leadership.
5. Huaya Intelligent (SZ003043).
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Main business: precision metal manufacturing Hot engine plan Core competitiveness: Provide professional precision metal manufacturing solutions.
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