Product Overview:
The RTP1000-LCD is a 4"RTP (Rapid Heat Treatment) tube furnace.
It includes a multi-channel proton flow meter control system, which can view gas flow curves and data in real time while operating.
He is designed for semiconductor substrates and solar cells or other samples (size up to 3"Annealed and designed.
The device is heated with a short-wave infrared lamp and can heat up to 50 seconds.
50 levels of precise temperature control, the meter temperature control accuracy is +-1.
The RS485 interface and control software can control the furnace operation and display the temperature profile via a computer.
Features: Rapid heating up to 50 s.
Equipped with a multi-channel proton flow meter control system, it can view the gas flow curve and data in real time while operating.
The maximum temperature of 110 mmo and 900 meters in the ultra-large pipe diameter can be reached.
The flange is equipped with a slide rail for direct push-pull operation.
Open the door and cut off the power. Basic parameters:
Operating temperature: up to 900 (<10min); 800℃(<30min);600 (long-term) • Fastest heating rate: room temperature 800 : 50 s, 800 900 : 10 s • Flange: KF-25D stainless steel high vacuum flange Heating zone length: 190mm • Heating element: 8 infrared lamps (1 per unit5kw) Maximum power: 12kw (>60A insurance) Equipment power supply: AC220V 50ez, single-phase circulating water flow: 05 m3 h standard flow metering range: 16-160 ml min, multi-channel proton flowmeter system parameters, input voltage: ac 220v 50hz single phase, power: 23w temperature control system:
The temperature is adjusted by PID, and 50 levels of temperature rise and fall program can be set ・The temperature control instrument is equipped with overheating and couple breakage protection ・The temperature control accuracy of the instrument is +-1 ・ Thermocouple model: R type.