The principle and application of white light interferometer to measure surface topography and struct

Mondo Science Updated on 2024-01-30

A white light interferometer is a precision instrument used to measure the topography and structure of a surface. The principle is to use the phenomenon of white light interference to measure the height change of the surface. The measurement principle, application areas, and advantages and disadvantages of white light interferometers are described in detail below.

White light interferometers use the phenomenon of light interference to measure surface topography. When a beam of white light passes through the beam splitter, it is divided into multiple beams, which are reflected and refracted to form interference fringes. When the height of the surface changes, the interference fringes also change, and the change in the surface height can be determined by measuring the amount of change in the interference fringes.

White light interferometers have a wide range of applications in several fields, the most typical of which are micro and nanometer measurements and surface topography analysis. In the field of micro-nano manufacturing, white light interferometers can be used to measure the height and shape of nanoscale structures, providing important technical support for the manufacture of high-precision and high-quality micro-nano devices. In the field of surface morphology analysis, white light interferometer can be used to measure surface roughness, waviness and other parameters, providing important data support for research in materials science, mechanical engineering and other fields.

The advantages of white light interferometer are mainly as follows:

High-precision measurement: White light interferometers can achieve high-precision measurement of micron-scale and even nano-scale structures, providing important technical support for the manufacture of high-precision, high-quality micro-nano devices.

Real-time: White light interferometer can achieve real-time measurement, which is very suitable for occasions that need to quickly obtain surface topography information.

Non-contact measurement: The white light interferometer adopts a non-contact measurement method, which will not cause damage and contamination to the measured object, and is a very reliable measurement method.

However, white light interferometers also have some drawbacks:

Higher: A white light interferometer is a precision instrument that is high and can be overwhelming for some small businesses and research institutes.

High requirements for operators: The operation of white light interferometer needs to be carried out by professionals, and it may be difficult for non-professionals to operate.

High environmental requirements: The measurement results of white light interferometer are easily affected by environmental factors, such as temperature and humidity, so they need to be measured in a stable experimental environment.

With the continuous development of science and technology, the application prospect of white light interferometer in various fields is becoming more and more broad. In the future, white light interferometers will be more widely used in the following aspects:

Micro and nano manufacturing: With the continuous development of micro and nano technology, white light interferometers will play a greater role in the field of micro and nano manufacturing, providing important technical support for the manufacture of high-precision and high-quality micro and nano devices.

Surface topography analysis: The application of white light interferometer in the field of surface topography analysis will be more extensive, providing important data support for research in materials science, mechanical engineering and other fields.

In short, white light interferometer, as a high-precision and high-efficiency measuring instrument, plays an important role in various fields. In the future, with the continuous progress of technology and the continuous expansion of application fields, white light interferometer will be applied and developed at a higher level.

White light interferometer

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