There are obvious differences between fast annealing furnaces and tube furnaces in terms of heating methods, heating efficiency, temperature range, and structure. are two common types in heat treatment equipment.
1. Heating method.
The fast annealing furnace is heated by electric heating tubes, such as resistance heaters, halogen lamps and induction coils, etc., which has the advantages of fast heating speed, precise temperature control and uniform temperature.
Shengding annealing furnace The rapid annealing furnace is heated by infrared halogen lamp, and the cooling is air-cooled, which can accurately control the temperature and ensure good reproducibility and temperature uniformity. The process range covers 200 to 1250 degrees Celsius, and the dedicated RTP algorithm is used.
Tube furnaces, on the other hand, typically use convection heating, in which the air inside the furnace is heated and applied to the sample in the tube by convection. Convection heating has the disadvantages of slow heating speed, uneven temperature distribution, and low heating efficiency.
2. Heating efficiency.
The heating efficiency of the fast annealing furnace is high, and the temperature can be accurately controlled during the heating process, and the temperature can be uniform, and the desired annealing effect can be quickly achieved. Rapid annealing furnaces typically heat up and deheat much faster than conventional tube furnaces and are better controlled in terms of precision. It can meet the stringent requirements of semiconductor devices for temperature and time accuracy.
On the other hand, tube furnaces have relatively low heating efficiency and slow heating speed, which is suitable for applications that do not require high heating speed.
3. Temperature range.
The temperature range of the rapid annealing furnace can reach 200 1250, and it can be applied to the annealing treatment of various industries, such as semiconductor industry, new energy industry, metal industry, etc.;Tube furnaces usually have a wide temperature range and can be used in a variety of heat treatment processes from low to high temperatures, including annealing, sintering, drying, etc. Due to their wide temperature range, tube furnaces are suitable for a variety of different industrial sectors, such as metalworking, ceramic sintering, powder metallurgy, etc.
Fourth, the structure. A fast annealing furnace is usually a flat or rectangular heat treatment device with one or more heating elements inside, usually located above or at the bottom. These heating elements can act on the sample surface by radiative heat transfer, allowing it to heat and cool down rapidly. In a fast annealing furnace, the sample is usually placed directly on the bottom tray or shelf inside the furnace.
A tube furnace is a closed furnace body, usually with a cylindrical or rectangular shape and heating elements inside. The sample is usually placed in a pipe inside the furnace through which the sample is heated. The structure and appearance of tube furnaces are relatively complex, and their operation and maintenance require certain professional skills.
Rapid annealing furnaces generally have a high level of safety. This kind of furnace is heated by electric heating tubes, with high temperature control accuracy, which can effectively control the temperature in the furnace and avoid overheating or local overheating. In addition, the sealing performance of the fast annealing furnace is better, which can effectively reduce the exchange of gas in the furnace and the outside air, thereby reducing the hazard to the operator.
In contrast, tube furnaces may be less safe. Since the tube furnace is heated by gas, there is a risk of gas leakage and **. At the same time, the sealing performance of the tube furnace is relatively poor, which is easy to cause gas leakage in the furnace and cause harm to the health of the operator.
When choosing to use heat treatment equipment, it is necessary to choose the right equipment according to the specific application needs. Although there are significant differences in performance and application between rapid annealing furnaces and tube furnaces, they are both indispensable equipment in industrial fields such as material handling and semiconductor manufacturing.